Ultrathin-Mo-Enabled NC-NAND with Sub-3.5 nm HZO for Scalable High-MW Operation
Author
Sangho Lee, Yongsu Kim, Yangjin Jung, Seungyeon Chang, Seokjoong Shin, Giuk Kim, Hongrae Joh, Woongin Kim, Sanghyun Park, Kwangyou Seo, Kwangsoo Kim, Wanki Kim, Daewon Ha, Jinho Ahn, Sanghun Jeon
Journal
2025 IEEE International Electron Devices Meeting (IEDM)