Record-Low EOT(3.6Å) & Jleak(7×10-8A/cm2@0.8V) HZO by Dielectric-Selective Microwave Annealing

Author

Hunbeom Shin, Giuk Kim, Sujeong Lee, Geonhyeong Kang, Hyojun Choi, Taeseung Jung, Sanghun Jeon, Hyung-Jun Kim, Jinho Ahn

Journal

2025 IEEE International Reliability Physics Symposium (IRPS)

Status

Accepted

Year

2025

Link

https://doi.org/10.1109/IRPS48204.2025.10983902 329회 연결