Development of MFMIS Gatestack with Thick Hafnium Zirconium Oxide (HZO) for Nonvolatile Memory Application 

Year

2023 

Author

Bohyeon Kang, Jongseo Park, Junghyeon Hwang, Sangho Lee, Hunbeom Shin, Jehyun An, Hyunseo You, Sung-Min Ahn, Sanghun Jeon, Rock-Hyun Baek 

Conference

2023 7th IEEE Electron Devices Technology & Manufacturing Conference (EDTM)